Inventor
Jeffery W. Butterbaugh
Inventor
Eden Prairie, MN, US
Overview
Patents· 20 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1032%
H01LSemiconductor devices16%
B08BCleaning in general14%
C23CCoating metallic material8%
C03CChemical composition of glasses, glazes or vitreous enamels6%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests6%
C23FNon-mechanical removal of metallic material from surface5%
B81CProcesses or apparatus specially adapted for the manufacture or treatment of microstructural devices or systems3%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices3%
H10DInorganic electric semiconductor devices3%
PatentTitleYear
10,991,610Systems and methods for treating substrates with cryogenic fluid mixtures202110,843,236Systems and methods for rotating and translating a substrate in a process chamber202010,748,789Systems and methods for treating substrates with cryogenic fluid mixtures202010,062,596Systems and methods for treating substrates with cryogenic fluid mixtures201810,020,217Systems and methods for treating substrates with cryogenic fluid mixtures201810,014,191Systems and methods for treating substrates with cryogenic fluid mixtures20189,691,628'Process for silicon nitride removal selective to SiGex'20179,299,570'Process for silicon nitride removal selective to SiGex '20169,059,104'Process for selectively removing nitride from substrates'20158,920,577'Process for treatment of substrates with water vapor or steam'20147,819,984'Process for treatment of substrates with water vapor or steam'20107,025,831'Apparatus for surface conditioning'20066,465,374'Method of surface preparation'20026,124,211'Cleaning method'20006,107,166'Vapor phase cleaning of alkali and alkaline earth metals'20006,015,503'Method and apparatus for surface conditioning'20005,782,986'Process for metals removal using beta-diketone or beta-ketoimine ligand forming compounds'19985,716,495'Cleaning method'19985,580,421'Apparatus for surface conditioning'19965,534,107'UV-enhanced dry stripping of silicon nitride films'1996Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1996–1998Patents assigned to FSI INT (4)· patent assignee history
1996–2000Based in Chanhassen, MN, US· patent location history
2000–2010Patents assigned to FSI INT INC (6)· patent assignee history
2000–2021Based in Eden Prairie, MN, US· patent location history
2014–2021Patents assigned to TEL FSI INC (10)· patent assignee history
2014–2015Patents assigned to BUTTERBAUGH JEFFERY W (2)· patent assignee history
2015Based in Eden Praire, MN, US· patent location history
2020–2021Patents assigned to TEL MFG AND ENGINEERING OF AMERICA INC (2)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TEL FSI INC | 10 | 2014–2021 |
| FSI INT INC | 6 | 2000–2010 |
| FSI INT | 4 | 1996–1998 |
| BUTTERBAUGH JEFFERY Wself | 2 | 2014–2015 |
| TEL MFG AND ENGINEERING OF AMERICA INC | 2 | 2020–2021 |
Locations
| Location | Patents | Span |
|---|---|---|
| Eden Prairie, Minnesota, US | 14 | 2000–2021 |
| Chanhassen, Minnesota, US | 5 | 1996–2000 |
| Eden Praire, Minnesota, US | 1 | 2015 |