Inventor
Robert S. Blackwood
Inventor
Chanhassen, MN, US
Overview
Patents· 8 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
Y10Sprimary
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests35%
B05BSpraying apparatus12%
B08BCleaning in general12%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices12%
H05BElectric heating12%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1012%
Y02PClimate change mitigation technologies in the production or processing of goods6%
PatentTitleYear
5,418,382'Substrate location and detection apparatus'19954,749,440'Gaseous process and apparatus for removing films from substrates'19884,286,541'Applying photoresist onto silicon wafers'19814,197,000'Positive developing method and apparatus'19804,132,567'Apparatus for and method of cleaning and removing static charges from substrates'19794,004,130'Hot plates'19773,990,462'Substrate stripping and cleaning apparatus'19763,936,660'Hot plate'1976Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1976–1977Patents assigned to FLUOROWARE SYSTEMS CORP (3)· patent assignee history
1976–1981Based in Chanhassen, MN, US· patent location history
1979–1988Patents assigned to FSI CORP (4)· patent assignee history
1988Patents assigned to TEXAS INSTRUMENTS INC (1)· patent assignee history
1988–1995Based in Lubbock, TX, US· patent location history
1995Patents assigned to FSI INT INC (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| FSI CORP | 4 | 1979–1988 |
| FLUOROWARE SYSTEMS CORP | 3 | 1976–1977 |
| FSI INT INC | 1 | 1995 |
| TEXAS INSTRUMENTS INC | 1 | 1988 |
Locations
| Location | Patents | Span |
|---|---|---|
| Chanhassen, Minnesota, US | 6 | 1976–1981 |
| Lubbock, Texas, US | 2 | 1988–1995 |