Inventor

ANAND S. MURTHY

Inventor
US

Overview

94→
Patents
2021–2026
Patent span
Electricity
Primary field (CPC H)

Patents· 94 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H10Dprimary
H10DInorganic electric semiconductor devices33%
H01LSemiconductor devices27%
B82YSpecific uses or applications of nanostructures16%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1012%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h109%
H10BElectronic memory devices2%
G02BOptical elements, systems or apparatus0%
G11CStatic stores0%
H03KPulse technique0%
PatentTitleYear
12,598,777Low temperature, high germanium, high boron SiGe:B pEPI with titanium silicide contacts for ultra-low PMOS contact resistivity and thermal stability202612,593,486Dual contact process with selective deposition202612,588,485Integrated circuit structures having airgaps for backside signal routing or power delivery202612,588,189Memory devices with vertical transistors202612,575,170Low temperature, high germanium, high boron SiGe:B pEPI with a silicon rich capping layer for ultra-low PMOS contact resistivity and thermal stability202612,575,151Gate-all-around integrated circuit structures having doped subfin202612,575,401Integrated circuit devices with angled transistors and angled routing tracks202612,563,724Two transistor memory cells with source-drain coupling in one transistor202612,550,401Doped STI to reduce source/drain diffusion for germanium NMOS transistors202612,527,078Gate-all-around integrated circuit structures having epitaxial source or drain region lateral isolation202612,525,295Two transistor memory cells with angled transistors202612,527,026Field-effect transistor with hybrid switching mechanism202612,520,573SiGe:GAB source or drain structures with low resistivity202612,520,482Memory arrays with backside components and angled transistors202612,506,127Package architecture of photonic system with vertically stacked dies having planarized edges202512,471,362Integrated circuit structures having ultra-high conductivity global routing202512,471,334Integrated circuit devices with angled transistors formed based on angled wafers202512,439,640Reduced contact resistivity with PMOS germanium and silicon doped with boron gate all around transistors202512,432,964Co-integrated gallium nitride (GaN) and complementary metal oxide semiconductor (CMOS) integrated circuit technology202512,426,342Low germanium, high boron silicon rich capping layer for PMOS contact resistance thermal stability202512,419,091Source electrode and drain electrode protection for nanowire transistors202512,402,387Integrated circuit structures including a titanium silicide material202512,363,967Integration methods to fabricate internal spacers for nanowire devices202512,349,420Device, method and system to provide a stressed channel of a transistor202512,342,574Contact resistance reduction in transistor devices with metallization on both sides202512,328,927Low resistance and reduced reactivity approaches for fabricating contacts and the resulting structures202512,328,920Nanoribbon sub-fin isolation by backside Si substrate removal etch selective to source and drain epitaxy202512,294,027Semiconductor device having doped epitaxial region and its methods of fabrication202512,288,808High aspect ratio source or drain structures with abrupt dopant profile202512,288,803Transistor with isolation below source and drain202512,237,420Fin smoothing and integrated circuit structures resulting therefrom202512,170,319Dual contact process with stacked metal layers202412,166,124Gate-all-around integrated circuit structures having germanium-doped nanoribbon channel structures202412,148,751Use of a placeholder for backside contact formation for transistor arrangements202412,119,387Low resistance approaches for fabricating contacts and the resulting structures202412,107,085Interconnect techniques for electrically connecting source/drain regions of stacked transistors202412,046,517Self-aligned 3-D epitaxial structures for MOS device fabrication202412,046,600Techniques for achieving multiple transistor fin dimensions on a single die202412,046,654Integrated circuit structures including a titanium silicide material202412,027,417Source or drain structures with high germanium concentration capping layer202412,021,081Techniques for achieving multiple transistor fin dimensions on a single die202412,021,149Fin smoothing and integrated circuit structures resulting therefrom202411,996,447Field effect transistors with gate electrode self-aligned to semiconductor fin202411,942,526Integrated circuit contact structures202411,923,410Transistor with isolation below source and drain202411,908,934Semiconductor device having doped epitaxial region and its methods of fabrication202411,869,939Integration methods to fabricate internal spacers for nanowire devices202411,804,523High aspect ratio source or drain structures with abrupt dopant profile202311,784,239Subfin leakage suppression using fixed charge202311,764,275Indium-containing fin of a transistor device with an indium-rich core202311,757,037Epitaxial oxide plug for strained transistors202311,757,004Transistors including source/drain employing double-charge dopants202311,742,346Interconnect techniques for electrically connecting source/drain regions of stacked transistors202311,735,670Non-selective epitaxial source/drain deposition to reduce dopant diffusion for germanium NMOS transistors202311,699,756Source/drain diffusion barrier for germanium nMOS transistors202311,682,731Fin smoothing and integrated circuit structures resulting therefrom202311,676,965Strained tunable nanowire structures and process202311,670,682FINFET transistor having a doped sub fin structure to reduce channel to substrate leakage202311,631,737Ingaas epi structure and wet etch process for enabling III-v GAA in art trench202311,588,017Nanowire for transistor integration202311,581,406Method of fabricating CMOS FinFETs by selectively etching a strained SiGe layer202311,575,005Asymmetrical semiconductor nanowire field-effect transistor202311,557,658Transistors with high density channel semiconductor over dielectric material202311,557,676Device, method and system to provide a stressed channel of a transistor202311,538,905Nanowire transistors employing carbon-based layers202211,508,813Column IV transistors for PMOS integration202211,482,457Substrate defect blocking layers for strained channel semiconductor devices202211,476,344Contact resistance reduction employing germanium overlayer pre-contact metalization202211,456,372Multi-height finfet device by selective oxidation202211,450,738Source/drain regions in integrated circuit structures202211,444,159Field effect transistors with wide bandgap materials202211,444,166Backside source/drain replacement for semiconductor devices with metallization on both sides202211,430,787Forming crystalline source/drain contacts on semiconductor devices202211,430,868Buried etch-stop layer to help control transistor source/drain depth202211,417,655High-mobility semiconductor source/drain spacer202211,411,096Source electrode and drain electrode protection for nanowire transistors202211,404,575Diverse transistor channel materials enabled by thin, inverse-graded, germanium-based layer202211,387,320Transistors with high concentration of germanium202211,355,621Non-planar semiconductor device including a replacement channel structure202211,335,600Integration method for finfet with tightly controlled multiple fin heights202211,302,777Integration methods to fabricate internal spacers for nanowire devices202211,296,079PMOS and NMOS contacts in common trench202211,276,755Field effect transistors with gate electrode self-aligned to semiconductor fin202211,251,302Epitaxial oxide plug for strained transistors202211,251,281Contact resistance reduction employing germanium overlayer pre-contact metalization202211,232,948Layered substrate for microelectronic devices202211,233,148Reducing band-to-band tunneling in semiconductor devices202211,222,977Source/drain diffusion barrier for germanium NMOS transistors202211,205,707Optimizing gate profile for performance and gate fill202111,195,919Method of fabricating a semiconductor device with strained SiGe fins and a Si cladding layer202111,189,730Non-selective epitaxial source/drain deposition to reduce dopant diffusion for germanium nMOS transistors202111,177,255Transistor structures having multiple threshold voltage channel materials202111,164,747Group III-V semiconductor devices having asymmetric source and drain structures202111,152,361Techniques for achieving multiple transistor fin dimensions on a single die2021

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2021–2026Patents assigned to INTEL CORP (88)· patent assignee history
2021–2026Based in US· patent location history
2022–2023Patents assigned to DAEDALUS PRIME LLC (3)· patent assignee history
2022–2025Patents assigned to SONY GROUP CORP (3)· patent assignee history
2023–2024Patents assigned to TAHOE RES LTD (2)· patent assignee history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
INTEL CORP882021–2026
DAEDALUS PRIME LLC32022–2023
SONY GROUP CORP32022–2025
TAHOE RES LTD22023–2024
Locations
LocationPatentsSpan
US942021–2026