Inventor
JAEYONG CHO
Inventor
US
Overview
Patents· 10 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Lprimary
H01LSemiconductor devices27%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1027%
H01JElectric discharge tubes or discharge lamps24%
C23CCoating metallic material14%
B23QDetails, components, or accessories for machine tools, e.g. arrangements for copying or controlling3%
H02NElectric machines not otherwise provided for3%
H05BElectric heating3%
PatentTitleYear
12,562,353Replaceable electrostatic chuck outer ring for edge arcing mitigation202612,525,480Electrostatic chuck pedestal heater for high bow wafers202612,300,473Electrostatic chuck for high bias radio frequency (RF) power application in a plasma processing chamber202512,272,575Advanced temperature control for wafer carrier in plasma processing chamber202512,198,966Substrate support with multiple embedded electrodes202511,948,826High power electrostatic chuck design with radio frequency coupling202411,894,255Sheath and temperature control of process kit202411,837,479Advanced temperature control for wafer carrier in plasma processing chamber202311,551,916Sheath and temperature control of a process kit in a substrate processing chamber202311,532,497High power electrostatic chuck design with radio frequency coupling2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2026Patents assigned to APPLIED MATERIALS INC (9)· patent assignee history
2022–2026Based in US· patent location history
2026Patents assigned to ASM IP HOLDING BV (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 9 | 2022–2026 |
| ASM IP HOLDING BV | 1 | 2026 |
Locations
| Location | Patents | Span |
|---|---|---|
| US | 10 | 2022–2026 |