Inventor
TSUKASA HORI
Inventor
JP
Overview
Patents· 5 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices36%
H05GX-ray technique36%
H01LSemiconductor devices9%
H01SDevices using the process of light amplification by stimulated emission of radiation [laser] to amplify or generate light9%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h109%
PatentTitleYear
12,567,713Discharge electrode, method for manufacturing anode, and method for manufacturing electronic devices202611,363,706Target supply device, extreme ultraviolet light generation apparatus, and electronic device manufacturing method202211,360,391Target supply device, extreme ultraviolet light generating apparatus, and electronic device manufacturing method202211,320,740Target supply device, target supply method, and electronic device manufacturing method202211,310,899Target supply device, target supply method, and electronic device manufacturing method2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2026Patents assigned to GIGAPHOTON INC (5)· patent assignee history
2022–2026Based in JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| GIGAPHOTON INC | 5 | 2022–2026 |
Locations
| Location | Patents | Span |
|---|---|---|
| JP | 5 | 2022–2026 |