LexDanaLexDanabeta
Inventor

ROBERT JOHN SOCHA

Inventor
US

Overview

2→
Patents
2024–2026
Patent span
Physics
Primary field (CPC G)

Patents· 2 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices50%
G01BMeasuring length, thickness or similar linear dimensions25%
G06FElectric digital data processing25%
PatentTitleYear
12,585,201Metrology mark structure and method of determining metrology mark structure202611,966,166Measurement apparatus and a method for determining a substrate grid2024

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2024–2026Patents assigned to ASML NETHERLANDS BV (2)· patent assignee history
2024–2026Based in US· patent location history
2026Patents assigned to ASML HOLDING NV (1)· patent assignee history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
ASML NETHERLANDS BV22024–2026
ASML HOLDING NV12026
Locations
LocationPatentsSpan
US22024–2026