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Inventor

Tetsuya Marubayashi

Inventor
Toyama, JP

Overview

4→
Patents
2000–2011
Patent span
Electricity
Primary field (CPC H)

Patents· 4 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1057%
C23CCoating metallic material43%
PatentTitleYear
8,070,880'Substrate processing apparatus'20118,071,477'Method of manufacturing semiconductor device and substrate processing apparatus'20116,332,898'Substrate processing apparatus and maintenance method therefor'20016,143,040'Substrate processing apparatus and maintenance method therefor'2000

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2000–2001Patents assigned to KOKUSAI ELECTRIC CO LTD (2)· patent assignee history
2000–2001Based in Tokyo, JP· patent location history
2011Patents assigned to HITACHI INT ELECTRIC INC (2)· patent assignee history
2011Patents assigned to INOKUCHI YASUHIRO (2)· patent assignee history
2011Patents assigned to MARUBAYASHI TETSUYA (2)· patent assignee history
2011Patents assigned to MORIYA ATSUSHI (1)· patent assignee history
2011Based in Toyama, JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
HITACHI INT ELECTRIC INC22011
INOKUCHI YASUHIRO22011
KOKUSAI ELECTRIC CO LTD22000–2001
MARUBAYASHI TETSUYAself22011
MORIYA ATSUSHI12011
Locations
LocationPatentsSpan
Toyama, JP22011
Tokyo, JP22000–2001