Inventor
Masaya Kawamata
Inventor
Miyagi, JP
Overview
Patents· 6 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps29%
H01LSemiconductor devices24%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1024%
C23CCoating metallic material5%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices5%
H05HPlasma technique5%
H10BElectronic memory devices5%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h105%
PatentTitleYear
9,887,109'Plasma etching method and plasma etching apparatus'20189,583,361'Method of processing target object and plasma processing apparatus'20179,502,219'Plasma processing method'20169,460,893'Substrate processing apparatus'20169,349,619'Plasma etching method and plasma etching apparatus'20169,202,707'Semiconductor device manufacturing method'2015Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2015–2018Patents assigned to TOKYO ELECTRON LTD (6)· patent assignee history
2015–2018Based in Miyagi, JP· patent location history
2016Patents assigned to HONDA MASANOBU (2)· patent assignee history
2016Patents assigned to KAWAMATA MASAYA (2)· patent assignee history
2016Patents assigned to KUBOTA KAZUHIRO (2)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 6 | 2015–2018 |
| HONDA MASANOBU | 2 | 2016 |
| KAWAMATA MASAYAself | 2 | 2016 |
| KUBOTA KAZUHIRO | 2 | 2016 |
Locations
| Location | Patents | Span |
|---|---|---|
| Miyagi, JP | 6 | 2015–2018 |