Inventor
Hrishikesh Patel
Inventor
Eindhoven, NL
Overview
Patents· 5 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices29%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1029%
Y10TTechnical subjects covered by former us classification21%
G21KHandling of particles or ionising radiation not otherwise provided for7%
H01LSemiconductor devices7%
H05GX-ray technique7%
PatentTitleYear
10,191,377Lithographic apparatus and a device manufacturing method20199,618,858'Lithographic apparatus and a device manufacturing method involving thermal conditioning of a table'20178,941,815'Substrate table for a lithographic apparatus, lithographic apparatus, method of using a substrate table and device manufacturing method'20158,680,493'Radiation conduit for radiation source'20148,472,003'Fluid handling structure, lithographic apparatus and device manufacturing method'2013Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2013–2019Patents assigned to ASML NETHERLANDS BV (5)· patent assignee history
2013–2017Patents assigned to PATEL HRISHIKESH (4)· patent assignee history
2013–2017Patents assigned to BLOKS RUUD HENDRIKUS MARTINUS JOHANNES (2)· patent assignee history
2013–2017Patents assigned to JACOBS JOHANNES HENRICUS WILHELMUS (2)· patent assignee history
2013–2014Patents assigned to JANSSEN FRANCISCUS JOHANNES JOSEPH (2)· patent assignee history
2013–2019Based in Eindhoven, NL· patent location history
2014Based in Eindoven, NL· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ASML NETHERLANDS BV | 5 | 2013–2019 |
| PATEL HRISHIKESHself | 4 | 2013–2017 |
| BLOKS RUUD HENDRIKUS MARTINUS JOHANNES | 2 | 2013–2017 |
| JACOBS JOHANNES HENRICUS WILHELMUS | 2 | 2013–2017 |
| JANSSEN FRANCISCUS JOHANNES JOSEPH | 2 | 2013–2014 |
Locations
| Location | Patents | Span |
|---|---|---|
| Eindhoven, NL | 4 | 2013–2019 |
| Eindoven, NL | 1 | 2014 |