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Inventor

Kazuyuki Kuwahara

Inventor
Tokyo, JP

Overview

2→
Patents
2003–2021
Patent span
Electricity
Primary field (CPC H)

Patents· 2 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H01Jprimary
H01JElectric discharge tubes or discharge lamps33%
G01BMeasuring length, thickness or similar linear dimensions17%
G01NInvestigating or analysing materials by determining their chemical or physical properties17%
H01LSemiconductor devices17%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1017%
PatentTitleYear
10,971,369Plasma processing method and plasma processing apparatus20216,576,902'Correction method of scanning electron microscope'2003

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2003Patents assigned to OKI ELECTRIC IND CO LTD (1)· patent assignee history
2003–2021Based in Tokyo, JP· patent location history
2021Patents assigned to HITACHI HIGH TECH CORP (1)· patent assignee history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
HITACHI HIGH TECH CORP12021
OKI ELECTRIC IND CO LTD12003
Locations
LocationPatentsSpan
Tokyo, JP22003–2021