Inventor
Thomas Poiesz
Inventor
Veldhoven, NL
Overview
Patents· 12 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices36%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1018%
H01LSemiconductor devices15%
B01DSeparation6%
B05BSpraying apparatus6%
F23JRemoval or treatment of combustion products or combustion residues6%
Y02CCapture, storage, sequestration or disposal of greenhouse gases [ghg]6%
B23HWorking of metal by the action of a high concentration of electric current on a workpiece using an electrode which takes the place of a tool3%
H02NElectric machines not otherwise provided for3%
PatentTitleYear
11,086,234Substrate holder and a method of manufacturing a device202110,871,715Lithographic apparatus and a device manufacturing method202010,768,535Support apparatus, a lithographic apparatus and a device manufacturing method202010,719,019Substrate holder and a method of manufacturing a substrate holder202010,656,536Substrate support, method for loading a substrate on a substrate support location, lithographic apparatus and device manufacturing method202010,599,053Lithographic apparatus and method for loading a substrate202010,514,615Support apparatus, lithographic apparatus and device manufacturing method201910,453,734Substrate holder, a lithographic apparatus and method of manufacturing devices201910,353,303Lithographic apparatus and method for loading a substrate201910,310,393Substrate support, method of compensating unflatness of an upper surface of a substrate, lithographic apparatus and device manufacturing method20199,939,736Substrate holder and support table for lithography20189,798,253'Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method'2017Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2017–2021Patents assigned to ASML NETHERLANDS BV (12)· patent assignee history
2017–2021Based in Veldhoven, NL· patent location history
2020Patents assigned to ASML HOLDING NV (2)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ASML NETHERLANDS BV | 12 | 2017–2021 |
| ASML HOLDING NV | 2 | 2020 |
Locations
| Location | Patents | Span |
|---|---|---|
| Veldhoven, NL | 12 | 2017–2021 |