Inventor

Ralf Scharnweber

Inventor

Aalen, DE

Overview

2009–2018

Patent span

Physics

Primary field (CPC G)

Patents· 10 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Fprimary

G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices67%

G02BOptical elements, systems or apparatus20%

Y10TTechnical subjects covered by former us classification13%

PatentTitleYear

9,946,161Optical system for a microlithographic projection exposure apparatus and microlithographic exposure method2018 9,575,414'Illumination system for a microlithographic projection exposure apparatus'2017 9,217,930'Illumination system for a microlithographic projection exposure apparatus'2015 8,634,060'Method for a multiple exposure, microlithography projection exposure installation and a projection system'2014 8,587,767'Illumination optics for EUV microlithography and related system and apparatus'2013 8,520,307'Optical integrator for an illumination system of a microlithographic projection exposure apparatus'2013 8,395,756'Illumination system for a microlithographic projection exposure apparatus'2013 7,880,969'Optical integrator for an illumination system of a microlithographic projection exposure apparatus'2011 7,875,418'Method for a multiple exposure, microlithography projection exposure installation and a projection system'2011 7,561,253'Method for a multiple exposure, microlithography projection exposure installation and a projection system'2009

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2009–2011Patents assigned to ZEISS CARL SMT AG (3)· patent assignee history

2009–2018Based in Aalen, DE· patent location history

2013–2018Patents assigned to ZEISS CARL SMT GMBH (7)· patent assignee history

2013–2014Patents assigned to SCHARNWEBER RALF (4)· patent assignee history

2013Patents assigned to LAYH MICHAEL (2)· patent assignee history

2013Patents assigned to SCHOLZ AXEL (2)· patent assignee history

Inventor activity

Assignee and location history derived from the patent record.

Assignees

Assignee	Patents	Span
ZEISS CARL SMT GMBH	7	2013–2018
SCHARNWEBER RALFself	4	2013–2014
ZEISS CARL SMT AG	3	2009–2011
LAYH MICHAEL	2	2013
SCHOLZ AXEL	2	2013

Locations

Location	Patents	Span
Aalen, DE	10	2009–2018