Inventor
Hua Chung
Inventor
Saratoga, CA, US
Overview
Patents· 5 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Lprimary
H01LSemiconductor devices22%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1022%
H01JElectric discharge tubes or discharge lamps17%
H10DInorganic electric semiconductor devices13%
C23CCoating metallic material9%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h109%
B01DSeparation4%
C23FNon-mechanical removal of metallic material from surface4%
PatentTitleYear
11,011,635Method of forming conformal epitaxial semiconductor cladding material over a fin field effect transistor (FINFET) device202110,964,528Integration of materials removal and surface treatment in semiconductor device fabrication202110,950,416Chamber seasoning to improve etch uniformity by reducing chemistry202110,950,428Method for processing a workpiece202110,910,228Surface treatment of carbon containing films using organic radicals2021Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2021Patents assigned to BEIJING E TOWN SEMICONDUCTOR TECH CO LTD (4)· patent assignee history
2021Patents assigned to MATTSON TECH INC (4)· patent assignee history
2021Patents assigned to APPLIED MATERIALS INC (1)· patent assignee history
2021Patents assigned to MATTSON TECHNOLGOY INC (1)· patent assignee history
2021Based in Saratoga, CA, US· patent location history
2021Based in San Jose, CA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| BEIJING E TOWN SEMICONDUCTOR TECH CO LTD | 4 | 2021 |
| MATTSON TECH INC | 4 | 2021 |
| APPLIED MATERIALS INC | 1 | 2021 |
| MATTSON TECHNOLGOY INC | 1 | 2021 |
Locations
| Location | Patents | Span |
|---|---|---|
| Saratoga, California, US | 4 | 2021 |
| San Jose, California, US | 1 | 2021 |