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Inventor

Kouji Egashira

Inventor
Tosu, JP

Overview

3→
Patents
2002–2004
Patent span
Electricity
Primary field (CPC H)

Patents· 3 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1050%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests50%
PatentTitleYear
6,799,586'Substrate processing method'20046,532,975'Substrate processing apparatus and substrate processing method'20036,345,947'Substrate arranging apparatus and method'2002

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2002–2004Patents assigned to TOKYO ELECTRON LTD (3)· patent assignee history
2002–2004Based in Tosu, JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TOKYO ELECTRON LTD32002–2004
Locations
LocationPatentsSpan
Tosu, JP32002–2004