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Inventor

Tadashi Mitsunaga

Inventor
Nirasaki, JP

Overview

2→
Patents
2018–2019
Patent span
Electricity
Primary field (CPC H)

Patents· 2 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

C23Cprimary
C23CCoating metallic material25%
H01JElectric discharge tubes or discharge lamps25%
H01LSemiconductor devices25%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1025%
PatentTitleYear
10,325,801Mounting table system, substrate processing apparatus, and temperature control method201910,014,145Vacuum exhaust method2018

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2018–2019Patents assigned to TOKYO ELECTRON LTD (2)· patent assignee history
2018Based in Yamanashi, JP· patent location history
2019Based in Nirasaki, JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TOKYO ELECTRON LTD22018–2019
Locations
LocationPatentsSpan
Nirasaki, JP12019
Yamanashi, JP12018