Inventor
RACHEL E. BATZER
Inventor
US
Overview
Patents· 8 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
C23Cprimary
C23CCoating metallic material19%
H01JElectric discharge tubes or discharge lamps19%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1019%
H01LSemiconductor devices15%
B05CApparatus for applying fluent materials to surfaces, in general7%
B08BCleaning in general4%
H10DInorganic electric semiconductor devices4%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h104%
LOC084%
LOC134%
PatentTitleYear
12,593,641Apparatuses for cleaning a multi-station semiconductor processing chamber2026D1114751Hub with gas deflectors2026D1099688Threaded nozzle insert202512,362,153Pedestal setup using camera wafer202512,331,402Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition202512,000,047Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition202411,920,239Minimizing radical recombination using ALD silicon oxide surface coating with intermittent restoration plasma2024D0948658High density hole pattern dual plenum hole showerhead assembly2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2026Patents assigned to LAM RES CORP (8)· patent assignee history
2022–2026Based in US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| LAM RES CORP | 8 | 2022–2026 |
Locations
| Location | Patents | Span |
|---|---|---|
| US | 8 | 2022–2026 |