Inventor

Tamarak Pandhumsoporn

Inventor

Fremont, CA, US

Overview

2001–2020

Patent span

Electricity

Primary field (CPC H)

Patents· 7 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H10Pprimary

H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1040%

C03CChemical composition of glasses, glazes or vitreous enamels13%

C23CCoating metallic material13%

H01JElectric discharge tubes or discharge lamps13%

B81CProcesses or apparatus specially adapted for the manufacture or treatment of microstructural devices or systems7%

C23FNon-mechanical removal of metallic material from surface7%

H01LSemiconductor devices7%

PatentTitleYear

10,854,492Edge ring assembly for improving feature profile tilting at extreme edge of wafer2020 8,262,920'Minimization of mask undercut on deep silicon etch'2012 7,985,688'Notch stop pulsing process for plasma processing system'2011 7,459,100'Methods and apparatus for sequentially alternating among plasma processes in order to optimize a substrate'2008 7,351,664'Methods for minimizing mask undercuts and notches for plasma processing system'2008 6,383,938'Method of anisotropic etching of substrates'2002 6,287,437'Recessed bonding of target for RF diode sputtering'2001

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2001–2002Patents assigned to CIT ALCATEL (2)· patent assignee history

2001–2020Based in Fremont, CA, US· patent location history

2008–2020Patents assigned to LAM RES CORP (5)· patent assignee history

2012Patents assigned to CHUNG PATRICK (1)· patent assignee history

2012Patents assigned to PANDHUMSOPORN TAMARAK (1)· patent assignee history

2012Patents assigned to SADJADI S M REZA (1)· patent assignee history

Inventor activity

Assignee and location history derived from the patent record.

Assignees

Assignee	Patents	Span
LAM RES CORP	5	2008–2020
CIT ALCATEL	2	2001–2002
CHUNG PATRICK	1	2012
PANDHUMSOPORN TAMARAKself	1	2012
SADJADI S M REZA	1	2012

Locations

Location	Patents	Span
Fremont, California, US	7	2001–2020