Inventor
Rene Monshouwer
Inventor
Leiden, NL
Overview
Patents· 10 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices77%
F16KValves8%
G01BMeasuring length, thickness or similar linear dimensions8%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h108%
PatentTitleYear
8,264,664'Method for producing a marker on a substrate, lithographic apparatus and device manufacturing method'20127,633,618'Method and apparatus for measuring the relative position of a first and a second alignment mark'20097,476,490'Method for producing a marker on a substrate, lithographic apparatus and device manufacturing method'20097,345,739'Lithographic alignment system and device manufacturing method'20087,312,846'Lithographic apparatus and device manufacturing method'20077,277,185'Method of measuring overlay'20077,095,499'Method of measuring alignment of a substrate with respect to a reference alignment mark'20066,937,334'Method of measuring alignment of a substrate with respect to a reference alignment mark'20056,937,344'Method of measuring overlay'20056,803,993'Lithographic apparatus and device manufacturing method'2004Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2004–2012Patents assigned to ASML NETHERLANDS BV (10)· patent assignee history
2004–2012Based in Leiden, NL· patent location history
2005–2008Based in Eindhoven, NL· patent location history
2008Patents assigned to KONINKL PHILIPS ELECTRONICS NV (1)· patent assignee history
2012Patents assigned to BURGHOORN JACOBUS (1)· patent assignee history
2012Patents assigned to MONSHOUWER RENE (1)· patent assignee history
2012Patents assigned to MOS EVERHARDUS CORNELIS (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ASML NETHERLANDS BV | 10 | 2004–2012 |
| BURGHOORN JACOBUS | 1 | 2012 |
| KONINKL PHILIPS ELECTRONICS NV | 1 | 2008 |
| MONSHOUWER RENEself | 1 | 2012 |
| MOS EVERHARDUS CORNELIS | 1 | 2012 |
Locations
| Location | Patents | Span |
|---|---|---|
| Leiden, NL | 5 | 2004–2012 |
| Eindhoven, NL | 5 | 2005–2008 |