Inventor
HIROSHI TSUJIMOTO
Inventor
JP
Overview
Patents· 5 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps38%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1023%
B23QDetails, components, or accessories for machine tools, e.g. arrangements for copying or controlling8%
C23CCoating metallic material8%
H01LSemiconductor devices8%
H02NElectric machines not otherwise provided for8%
H05KPrinted circuits8%
PatentTitleYear
12,387,914Upper electrode assembly202512,354,841Substrate processing device, substrate processing system, control method for substrate processing device, and control method for substrate processing system202512,217,942Plasma processing apparatus202511,676,800Substrate processing apparatus and control method of substrate processing apparatus202311,557,498Substrate processing method and substrate processing apparatus2023Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2023–2025Patents assigned to TOKYO ELECTRON LTD (5)· patent assignee history
2023–2025Based in JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 5 | 2023–2025 |
Locations
| Location | Patents | Span |
|---|---|---|
| JP | 5 | 2023–2025 |