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Inventor

Mitsunao Shibasaki

Inventor
Ebina, JP

Overview

5→
Patents
1998–2002
Patent span
Chemistry
Primary field (CPC C)

Patents· 5 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

C23Cprimary
C23CCoating metallic material33%
B08BCleaning in general22%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1022%
F26BDrying solid materials or objects by removing liquid therefrom11%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests11%
PatentTitleYear
6,387,182'Apparatus and method for processing substrate'20026,176,929'Thin-film deposition apparatus'20015,950,646'Vapor feed supply system'19995,904,301'Spraying device'19995,829,156'Spin dryer apparatus'1998

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

1998–2002Patents assigned to EBARA CORP (5)· patent assignee history
1998–2001Based in Ebina, JP· patent location history
2002Based in Tokyo, JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
EBARA CORP51998–2002
Locations
LocationPatentsSpan
Ebina, JP41998–2001
Tokyo, JP12002