Inventor
Robert J. Kavanagh
Inventor
Cambridge, MA, US
Overview
Patents· 7 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices30%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests26%
C08FMacromolecular compounds obtained by reactions only involving carbon-to-carbon unsaturated bonds17%
C07CAcyclic or carbocyclic compounds13%
G08GTraffic control systems4%
H02SGeneration of electric power by conversion of infrared radiation, visible light or ultraviolet light, e.g. using photovoltaic [pv] modules4%
Y02EReduction of greenhouse gas [ghg] emissions, related to energy generation, transmission or distribution4%
PatentTitleYear
7,309,750'Cyanoadamantyl compounds and polymers'20077,270,935'Cyanoadamantyl compounds and polymers and photoresists comprising same'20077,208,261'Polymers, processes for polymer synthesis and photoresist compositions'20077,205,087'Solvents and photoresist compositions for 193 nm imaging'20077,090,968'Copolymers having nitrile and alicyclic leaving groups and photoresist compositions comprising same'20066,841,331'Polymers, processes for polymer synthesis and photoresist compositions'20056,692,888'Copolymers having nitrile and alicyclic leaving groups and photoresist compositions comprising same'2004Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2004–2007Patents assigned to SHIPLEY CO LLC (5)· patent assignee history
2004–2007Based in Cambridge, MA, US· patent location history
2007Patents assigned to ROHM & HAAS ELECT MAT (2)· patent assignee history
2007Based in Natick, MA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| SHIPLEY CO LLC | 5 | 2004–2007 |
| ROHM & HAAS ELECT MAT | 2 | 2007 |
Locations
| Location | Patents | Span |
|---|---|---|
| Cambridge, Massachusetts, US | 4 | 2004–2007 |
| Natick, Massachusetts, US | 3 | 2007 |