Inventor
Jia Zeng
Inventor
Sunnyvale, CA, US
Overview
Patents· 1 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices25%
H01LSemiconductor devices25%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1025%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1025%
PatentTitleYear
11,061,315Hybrid optical and EUV lithography2021Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2021Patents assigned to GLOBALFOUNDRIES US INC (1)· patent assignee history
2021Based in Sunnyvale, CA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| GLOBALFOUNDRIES US INC | 1 | 2021 |
Locations
| Location | Patents | Span |
|---|---|---|
| Sunnyvale, California, US | 1 | 2021 |