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Inventor

Martin Haueis

Inventor
Jena, DE

Overview

3→
Patents
2005–2006
Patent span
Performing operations
Primary field (CPC B)

Patents· 3 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

B81Cprimary
B81CProcesses or apparatus specially adapted for the manufacture or treatment of microstructural devices or systems25%
G02BOptical elements, systems or apparatus25%
B81BMicrostructural devices or systems, e.g. micromechanical devices13%
C23CCoating metallic material13%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1013%
Y10TTechnical subjects covered by former us classification13%
PatentTitleYear
7,122,872'Control of stress in metal films by controlling the atmosphere during film deposition'20066,933,004'Control of stress in metal films by controlling the temperature during film deposition'20056,888,470'Sensing of mirror position in an optical switch'2005

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2005–2006Patents assigned to LUCENT TECHNOLOGIES INC (3)· patent assignee history
2005–2006Based in Jena, DE· patent location history
2005Based in Summit, NJ, US· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
LUCENT TECHNOLOGIES INC32005–2006
Locations
LocationPatentsSpan
Jena, DE22005–2006
Summit, New Jersey, US12005