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Inventor

CHUNG-HSUAN LIU

Inventor
TW

Overview

3→
Patents
2022–2025
Patent span
Electricity
Primary field (CPC H)

Patents· 3 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

B08Bprimary
B08BCleaning in general23%
H01LSemiconductor devices23%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1023%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices15%
H05HPlasma technique15%
PatentTitleYear
12,393,129Method and device for cleaning substrates202512,032,302Method and device for cleaning substrates202411,430,671Ozone wafer cleaning module having an ultraviolet lamp module with rotatable reflectors2022

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2022–2025Patents assigned to TAIWAN SEMICONDUCTOR MFG CO LTD (3)· patent assignee history
2022–2025Based in TW· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TAIWAN SEMICONDUCTOR MFG CO LTD32022–2025
Locations
LocationPatentsSpan
TW32022–2025