Inventor
Randall C. Hildenbrand
Inventor
Richardson, TX, US
Overview
Patents· 10 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
C23Cprimary
C23CCoating metallic material31%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1031%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests19%
H01JElectric discharge tubes or discharge lamps13%
C23FNon-mechanical removal of metallic material from surface6%
PatentTitleYear
5,248,636'Processing method using both a remotely generated plasma and an in-situ plasma with UV irradiation'19935,138,973'Wafer processing apparatus having independently controllable energy sources'19924,886,570'Processing apparatus and method'19894,872,938'Processing apparatus'19894,836,905'Processing apparatus'19894,822,450'Processing apparatus and method'19894,816,116'Semiconductor wafer transfer method and arm mechanism'19894,687,542'Vacuum processing system'19874,657,620'Automated single slice powered load lock plasma reactor'19874,657,618'Powered load lock electrode/substrate assembly including robot arm, optimized for plasma process uniformity and rate'1987Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1987–1993Patents assigned to TEXAS INSTRUMENTS INC (10)· patent assignee history
1987–1993Based in Richardson, TX, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TEXAS INSTRUMENTS INC | 10 | 1987–1993 |
Locations
| Location | Patents | Span |
|---|---|---|
| Richardson, Texas, US | 10 | 1987–1993 |