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Inventor

Bart van Schravendijk

Inventor
Sunnyvale, CA, US

Overview

12→
Patents
2013–2018
Patent span
Electricity
Primary field (CPC H)

Patents· 12 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1031%
C23CCoating metallic material18%
H01LSemiconductor devices18%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1015%
H01JElectric discharge tubes or discharge lamps10%
H10DInorganic electric semiconductor devices8%
PatentTitleYear
10,043,655Plasma activated conformal dielectric film deposition20189,670,579'Method for depositing a chlorine-free conformal SiN film'20179,570,274'Plasma activated conformal dielectric film deposition'20179,447,499'Dual plenum, axi-symmetric showerhead with edge-to-center gas delivery'20169,299,559'Flowable oxide film with tunable wet etch rate'20169,257,302'CVD flowable gap fill'20169,070,555'Method for depositing a chlorine-free conformal sin film'20158,999,859'Plasma activated conformal dielectric film deposition'20158,846,536'Flowable oxide film with tunable wet etch rate'20148,728,958'Gap fill integration'20148,685,867'Premetal dielectric integration process'20148,592,328'Method for depositing a chlorine-free conformal sin film'2013

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2013–2018Patents assigned to NOVELLUS SYSTEMS INC (12)· patent assignee history
2013–2016Patents assigned to VAN SCHRAVENDIJK BART (6)· patent assignee history
2013–2016Based in Sunnyvale, CA, US· patent location history
2014–2016Patents assigned to DRAEGER NERISSA (4)· patent assignee history
2014–2016Patents assigned to NITTALA LAKSHMINARAYANA (3)· patent assignee history
2014Patents assigned to ASHTIANI KAIHAN (2)· patent assignee history
2016–2018Based in Palo Alto, CA, US· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
NOVELLUS SYSTEMS INC122013–2018
VAN SCHRAVENDIJK BARTself62013–2016
DRAEGER NERISSA42014–2016
NITTALA LAKSHMINARAYANA32014–2016
ASHTIANI KAIHAN22014
Locations
LocationPatentsSpan
Sunnyvale, California, US82013–2016
Palo Alto, California, US42016–2018