Inventor
YUKIHIRO MORI
Inventor
JP
Overview
Patents· 14 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1024%
C23CCoating metallic material20%
H01LSemiconductor devices17%
H01JElectric discharge tubes or discharge lamps13%
B41JTypewriters7%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h104%
B08BCleaning in general2%
B65HHandling thin or filamentary material, e.g. sheets, webs, cables2%
G02FOptical devices or arrangements for the control of light by modification of the optical properties of the media of the elements involved therein2%
G06FElectric digital data processing2%
PatentTitleYear
12,431,334Gas distribution assembly202512,129,546Methods and apparatuses for flowable gap-fill202412,125,722Multi-stage substrate processing system202412,106,944Rotating substrate support202412,024,772Apparatuses for thin film deposition202412,002,661Susceptor having cooling device202411,986,868System dedicated for parts cleaning202411,761,084Substrate processing apparatus and method of processing substrate202311,600,503High-throughput, multi-chamber substrate processing system202311,509,778Communication system and printing apparatus202211,504,988Sheet cassette and printing system202211,462,387Substrate processing apparatus and substrate processing method202211,421,321Apparatuses for thin film deposition202211,285,743Printer2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2025Patents assigned to ASM IP HOLDING BV (11)· patent assignee history
2022Patents assigned to FUJITSU COMPONENT LTD (3)· patent assignee history
2022–2025Based in JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ASM IP HOLDING BV | 11 | 2022–2025 |
| FUJITSU COMPONENT LTD | 3 | 2022 |
Locations
| Location | Patents | Span |
|---|---|---|
| JP | 14 | 2022–2025 |