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Inventor

Yuko Iwabuchi

Inventor
Mito, JP

Overview

14→
Patents
1997–2013
Patent span
Physics
Primary field (CPC G)

Patents· 14 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H01Jprimary
H01JElectric discharge tubes or discharge lamps36%
G01NInvestigating or analysing materials by determining their chemical or physical properties23%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices21%
G06TImage data processing or generation, in general21%
PatentTitleYear
8,604,430'Method and an apparatus of an inspection system using an electron beam'20138,134,125'Method and apparatus of an inspection system using an electron beam'20127,439,506'Method and an apparatus of an inspection system using an electron beam'20087,232,996'Method and an apparatus of an inspection system using an electron beam'20077,012,252'Method and an apparatus of an inspection system using an electron beam'20066,987,265'Method and an apparatus of an inspection system using an electron beam'20066,580,074'Charged particle beam emitting device'20036,541,771'Scanning electron microscope'20036,512,227'Method and apparatus for inspecting patterns of a semiconductor device with an electron beam'20036,452,178'Method and an apparatus of an inspection system using an electron beam'20026,348,690'Method and an apparatus of an inspection system using an electron beam'20026,225,628'Scanning electron microscope'20015,894,124'Scanning electron microscope and its analogous device'19995,668,372'Scanning electron microscope and its analogous device'1997

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

1997–2013Patents assigned to HITACHI LTD (14)· patent assignee history
1997–2013Based in Mito, JP· patent location history
2012–2013Patents assigned to FUKUHARA SATORU (2)· patent assignee history
2012–2013Patents assigned to ICHIHASHI MIKIO (2)· patent assignee history
2012–2013Patents assigned to IWABUCHI YUKO (2)· patent assignee history
2012–2013Patents assigned to KANEKO YUTAKA (2)· patent assignee history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
HITACHI LTD141997–2013
FUKUHARA SATORU22012–2013
ICHIHASHI MIKIO22012–2013
IWABUCHI YUKOself22012–2013
KANEKO YUTAKA22012–2013
Locations
LocationPatentsSpan
Mito, JP141997–2013