Inventor
Ming-Hsun Tsai
Inventor
Hsinchu, TW
Overview
Patents· 9 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices21%
H05GX-ray technique21%
B08BCleaning in general7%
F23CMethods or apparatus for combustion using fluid fuel or solid fuel suspended in a carrier gas or air7%
F23GCremation furnaces7%
Y02EReduction of greenhouse gas [ghg] emissions, related to energy generation, transmission or distribution7%
F16KValves3%
F17CVessels for containing or storing compressed, liquefied or solidified gases3%
G02BOptical elements, systems or apparatus3%
G06FElectric digital data processing3%
PatentTitleYear
11,062,941Contact conductive feature formation and structure202110,875,060Method and apparatus for removing debris from collector202010,779,387Extreme ultraviolet photolithography system and method202010,719,020Droplet generator and method of servicing extreme ultraviolet radiation source apparatus202010,684,009Method and apparatus for controlling exhaust pressure for an extreme ultraviolet generation chamber202010,514,167Method and apparatus for controlling exhaust pressure for an extreme ultraviolet generation chamber201910,495,974Target feeding system20199,360,126'Relief valve assembly with anti-frozen shielding hat'20167,598,943'Resizable wireless pointing device with a storable receiver'2009Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2009Patents assigned to SU CHIH-WEN (1)· patent assignee history
2009Patents assigned to TSAI MING-HSUN (1)· patent assignee history
2009Based in Chung-Ho City, Taipei Hsien, TW· patent location history
2016Patents assigned to NAT SYNCHROTRON RADIATION RES CT (1)· patent assignee history
2016–2020Based in Hsinchu, TW· patent location history
2019–2021Patents assigned to TAIWAN SEMICONDUCTOR MFG CO LTD (7)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TAIWAN SEMICONDUCTOR MFG CO LTD | 7 | 2019–2021 |
| NAT SYNCHROTRON RADIATION RES CT | 1 | 2016 |
| SU CHIH-WEN | 1 | 2009 |
| TSAI MING-HSUNself | 1 | 2009 |
Locations
| Location | Patents | Span |
|---|---|---|
| Hsinchu, TW | 7 | 2016–2020 |
| Chung-Ho City, Taipei Hsien, TW | 1 | 2009 |