Inventor
Roy D. McGregor
Inventor
El Camino Village, CA, US
Overview
Patents· 7 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H05Gprimary
H05GX-ray technique70%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices20%
B82YSpecific uses or applications of nanostructures10%
PatentTitleYear
6,912,267'Erosion reduction for EUV laser produced plasma target sources'20056,864,497'Droplet and filament target stabilizer for EUV source nozzles'20056,835,944'Low vapor pressure, low debris solid target for EUV production'20046,738,452'Gasdynamically-controlled droplets as the target in a laser-plasma extreme ultraviolet light source'20046,661,018'Shroud nozzle for gas jet control in an extreme ultraviolet light source'20036,657,213'High temperature EUV source nozzle'20036,324,256'Liquid sprays as the target for a laser-plasma extreme ultraviolet light source'2001Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2001Patents assigned to TRW INC (1)· patent assignee history
2001–2005Based in El Camino Village, CA, US· patent location history
2003–2004Patents assigned to NORTHROP GRUMMAN CORP (3)· patent assignee history
2004–2005Patents assigned to UNIV CENTRAL FLORIDA RES FOUND (3)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| NORTHROP GRUMMAN CORP | 3 | 2003–2004 |
| UNIV CENTRAL FLORIDA RES FOUND | 3 | 2004–2005 |
| TRW INC | 1 | 2001 |
Locations
| Location | Patents | Span |
|---|---|---|
| El Camino Village, California, US | 7 | 2001–2005 |