Inventor
Ching-Yu Chang
Inventor
Changhua County, TW
Overview
Patents· 8 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1029%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices25%
H01LSemiconductor devices25%
H10DInorganic electric semiconductor devices8%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h108%
H01JElectric discharge tubes or discharge lamps4%
PatentTitleYear
11,043,388Integrated circuit fabrication system with adjustable gas injector and method utilizing the same202111,037,820Method for forming vias and method for forming contacts in vias202111,036,137Method for forming semiconductor structure202111,037,882Overlay mark202111,029,602Photoresist composition and method of forming photoresist pattern202111,022,885Photosensitive middle layer202111,022,886Bottom-up material formation for planarization202111,016,386Photoresist composition and method of forming photoresist pattern2021Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2021Patents assigned to TAIWAN SEMICONDUCTOR MFG CO LTD (8)· patent assignee history
2021Based in Changhua County, TW· patent location history
2021Based in Yuansun Village, TW· patent location history
2021Based in Tainan, TW· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TAIWAN SEMICONDUCTOR MFG CO LTD | 8 | 2021 |
Locations
| Location | Patents | Span |
|---|---|---|
| Changhua County, TW | 5 | 2021 |
| Yuansun Village, TW | 2 | 2021 |
| Tainan, TW | 1 | 2021 |