Inventor
MASSIMILIANO MERLI
Inventor
IT
Overview
Patents· 22 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G02Bprimary
G02BOptical elements, systems or apparatus30%
B81BMicrostructural devices or systems, e.g. micromechanical devices27%
G03BApparatus or arrangements for taking photographs or for projecting or viewing them12%
H10NElectric solid-state devices not otherwise provided for8%
B81CProcesses or apparatus specially adapted for the manufacture or treatment of microstructural devices or systems5%
H02NElectric machines not otherwise provided for4%
G01LMeasuring force, stress, torque, work, mechanical power, mechanical efficiency, or fluid pressure3%
H01LSemiconductor devices3%
H04MTelephonic communication3%
H04NPictorial communication, e.g. television3%
PatentTitleYear
12,585,107Microelectromechanical mirror device with piezoelectric actuation and optimized size202612,517,345MEMS mirror device with piezoelectric actuation and manufacturing process thereof202612,510,749Biaxial microelectromechanical mirror device with piezoelectric actuation202512,493,180Microelectromechanical mirror device with piezoelectric actuation having improved stress resistance202512,292,567Microelectromechanical mirror device with compensation of planarity errors202512,270,990Microelectromechanical mirror device with piezoelectric actuation and improved opening angle202512,242,051Microelectromechanical mirror device with piezoelectric actuation and piezoresistive sensing having self-calibration properties202512,222,492Microelectromechanical device having a structure tiltable by piezoelectric actuation about two rotation axes202512,117,608MEMS micromirror device enveloped in a package having a transparent surface and having a tiltable platform202412,117,605Angular piezoelectric actuator for a MEMS shutter and manufacturing method thereof202412,084,341MEMS device having an improved stress distribution and manufacturing process thereof202412,043,540Micro-electro-mechanical device with a shock-protected tiltable structure202411,953,813Microelectromechanical device with a structure tiltable by piezoelectric actuation having improved mechanical and electrical characteristics202411,933,968Biaxial resonant microelectromechanical mirror structure with piezoelectric actuation having improved characteristics202411,933,966Resonant MEMS device having a tiltable, piezoelectrically controlled micromirror202411,673,799Method of processing a wafer for manufacturing an oscillating structure such as a micro-mirror202311,656,539Microelectromechanical device with a structure tiltable by piezoelectric actuation having improved mechanical and electrical characteristics202311,655,140Micro-electro-mechanical device with a shock-protected tiltable structure202311,520,138Biaxial resonant microelectromechanical mirror structure with piezoelectric actuation having improved characteristics202211,448,871Micromechanical device having a structure tiltable by a quasi-static piezoelectric actuation and having stiffening elements202211,353,694Microelectromechanical mirror device with piezoelectric actuation, having an improved structure202211,327,295Resonant MEMS device having a tiltable, piezoelectrically controlled structure, in particular a micromirror2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2026Patents assigned to ST MICROELECTRONICS SRL (22)· patent assignee history
2022–2026Based in IT· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ST MICROELECTRONICS SRL | 22 | 2022–2026 |
Locations
| Location | Patents | Span |
|---|---|---|
| IT | 22 | 2022–2026 |