Inventor
Minami Teruomi
Inventor
Kurume, JP
Overview
Patents· 1 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1050%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests50%
PatentTitleYear
7,678,199'Substrate cleaning method'2010Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2010Patents assigned to TOKYO ELECTRON LTD (1)· patent assignee history
2010Based in Kurume, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 1 | 2010 |
Locations
| Location | Patents | Span |
|---|---|---|
| Kurume, JP | 1 | 2010 |