Inventor
Rock Nadeau
Inventor
Jericho, VT, US
Overview
Patents· 10 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
B24Bprimary
B24BMachines, devices, or processes for grinding or polishing40%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1040%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1020%
PatentTitleYear
6,579,149'Support and alignment device for enabling chemical mechanical polishing rinse and film measurements'20036,458,020'Slurry recirculation in chemical mechanical polishing'20026,340,601'Method for reworking copper metallurgy in semiconductor devices'20026,334,807'Chemical mechanical polishing in-situ end point system'20026,319,093'Chemical-mechanical polishing system and method for integrated spin dry-film thickness measurement'20016,022,266'In-situ pad conditioning process for CMP'20005,885,135'CMP wafer carrier for preferential polishing of a wafer'19995,874,318'Dishing and erosion monitor structure for damascene metal processing'19995,723,874'Dishing and erosion monitor structure for damascene metal processing'19985,663,637'Rotary signal coupling for chemical mechanical polishing endpoint detection with a westech tool'1997Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1997–2003Patents assigned to IBM (9)· patent assignee history
1997–1999Based in Essex Junction, VT, US· patent location history
1999Patents assigned to INTERNATIOAL BUSINESS MACHINES (1)· patent assignee history
1999–2002Based in Jericho, VT, US· patent location history
2003Based in Chittenden County, VT, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| IBM | 9 | 1997–2003 |
| INTERNATIOAL BUSINESS MACHINES | 1 | 1999 |
Locations
| Location | Patents | Span |
|---|---|---|
| Jericho, VT, US | 6 | 1999–2002 |
| Essex Junction, VT, US | 3 | 1997–1999 |
| Chittenden County, VT, US | 1 | 2003 |