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Inventor

Tsunehiko Nakamura

Inventor
Kokubu, JP

Overview

10→
Patents
1997–2015
Patent span
Electricity
Primary field (CPC H)

Patents· 10 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1043%
H05BElectric heating24%
Y10TTechnical subjects covered by former us classification14%
C04BLime, magnesia5%
C23CCoating metallic material5%
G11BInformation storage based on relative movement between record carrier and transducer5%
H01LSemiconductor devices5%
PatentTitleYear
8,956,459'Joined assembly, wafer holding assembly, attaching structure thereof and method for processing wafer'20158,519,309'Wafer heating apparatus and semiconductor manufacturing apparatus'20138,071,916'Wafer heating apparatus and semiconductor manufacturing apparatus'20117,646,580'Electrostatic chuck and wafer holding member and wafer treatment method'20107,457,098'Electrostatic chuck'20087,417,206'Heater, wafer heating apparatus and method for manufacturing heater'20087,361,865'Heater for heating a wafer and method for fabricating the same'20087,248,456'Electrostatic chuck'20076,914,222'Wafer heating apparatus'20055,648,303'Non-magnetic ceramics for recording/reproducing heads and method of producing the same'1997

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

1997–2015Patents assigned to KYOCERA CORP (10)· patent assignee history
1997–2008Based in Kokubu, JP· patent location history
2010–2015Based in Kirishima, JP· patent location history
2011–2015Patents assigned to NAKAMURA TSUNEHIKO (3)· patent assignee history
2011–2013Patents assigned to IWATA KEIJI (2)· patent assignee history
2011–2013Patents assigned to NAGASAKI KOICHI (2)· patent assignee history
2015Patents assigned to MAEHARA TATSUYA (1)· patent assignee history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
KYOCERA CORP101997–2015
NAKAMURA TSUNEHIKOself32011–2015
IWATA KEIJI22011–2013
NAGASAKI KOICHI22011–2013
MAEHARA TATSUYA12015
Locations
LocationPatentsSpan
Kokubu, JP61997–2008
Kirishima, JP42010–2015