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Inventor

Yuk Hong Ting

Inventor
Fremont, CA, US

Overview

2→
Patents
2001–2016
Patent span
Electricity
Primary field (CPC H)

Patents· 2 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H01Jprimary
H01JElectric discharge tubes or discharge lamps29%
B08BCleaning in general14%
C23CCoating metallic material14%
H01LSemiconductor devices14%
H05HPlasma technique14%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1014%
PatentTitleYear
9,397,011'Systems and methods for reducing copper contamination due to substrate processing chambers with components made of alloys including copper'20166,325,948'Waferless clean process of a dry etcher'2001

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2001Patents assigned to LAM RES CO LTD (1)· patent assignee history
2001Based in Hsinchu, TW· patent location history
2016Patents assigned to LAM RES CORP (1)· patent assignee history
2016Based in Fremont, CA, US· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
LAM RES CO LTD12001
LAM RES CORP12016
Locations
LocationPatentsSpan
Fremont, California, US12016
Hsinchu, TW12001