Inventor
Iqbal Shareef
Inventor
Fremont, CA, US
Overview
Patents· 32 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1022%
Y10TTechnical subjects covered by former us classification13%
C23CCoating metallic material11%
H01JElectric discharge tubes or discharge lamps9%
G01FMeasuring volume, volume flow, mass flow or liquid level7%
G05DSystems for controlling or regulating non-electric variables5%
H01LSemiconductor devices5%
B08BCleaning in general4%
F17DPipe-line systems4%
B01FMixing, e.g. dissolving, emulsifying or dispersing3%
PatentTitleYear
10,943,769Gas distributor and flow verifier202110,760,944Hybrid flow metrology for improved chamber matching202010,431,431Gas supply delivery arrangement including a gas splitter for tunable gas flow control201910,128,087Configuration independent gas delivery system201810,022,689Fluid mixing hub for semiconductor processing tool201810,002,747Methods and apparatus for supplying process gas in a plasma processing system20189,778,083'Metrology method for transient gas flow'20179,721,763'Systems and methods for providing gases to a process chamber'20179,721,782'Method and apparatus for shaping a gas profile near bevel edge'20179,704,761'Corrosion sensor retainer assembly apparatus and method for detecting corrosion'20179,580,360'Monolithic ceramic component of gas delivery system and method of making and use thereof'20179,364,870'Ultrasonic cleaning method and apparatus therefore'20169,335,768'Cluster mass flow devices and multi-line mass flow devices incorporating the same'20169,175,808'System and method for decreasing scrubber exhaust from gas delivery panels'20159,174,249'Ultrasonic cleaning method and apparatus therefore'20159,091,397'Shared gas panels in plasma processing chambers employing multi-zone gas feeds'20159,090,972'Gas supply systems for substrate processing chambers and methods therefor'20159,004,086'Methods and apparatus for displacing fluids from substrates using supercritical CO2'20158,851,113'Shared gas panels in plasma processing systems'20148,794,267'Gas transport delay resolution for short etch recipes'20148,521,461'Apparatus for delivering a process gas'20138,340,827'Methods for controlling time scale of gas delivery into a processing chamber'20128,150,646'Methods for delivering a process gas'20127,981,307'Method and apparatus for shaping gas profile near bevel edge'20117,881,886'Methods for performing transient flow prediction and verification using discharge coefficients'20117,822,570'Methods for performing actual flow verification'20107,731,798'Heated chuck for laser thermal processing'20107,326,877'Laser thermal processing chuck with a thermal compensating heater module'20087,176,405'Heat shield for thermal processing'20076,778,762'Sloped chamber top for substrate processing'20046,114,227'Chamber for reducing contamination during chemical vapor deposition'20006,079,353'Chamber for reducing contamination during chemical vapor deposition'2000Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2000Based in Campbell, CA, US· patent location history
2004–2021Based in Fremont, CA, US· patent location history
2007–2010Patents assigned to ULTRATECH INC (3)· patent assignee history
2010–2021Patents assigned to LAM RES CORP (25)· patent assignee history
2012–2015Patents assigned to SHAREEF IQBAL A (4)· patent assignee history
2014–2018Patents assigned to SHAREEF IQBAL (6)· patent assignee history
2014–2018Patents assigned to TASKAR MARK (5)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| LAM RES CORP | 25 | 2010–2021 |
| SHAREEF IQBALself | 6 | 2014–2018 |
| TASKAR MARK | 5 | 2014–2018 |
| SHAREEF IQBAL Aself | 4 | 2012–2015 |
| ULTRATECH INC | 3 | 2007–2010 |
Locations
| Location | Patents | Span |
|---|---|---|
| Fremont, California, US | 30 | 2004–2021 |
| Campbell, California, US | 2 | 2000 |