Inventor
Olga Regelman
Inventor
Daly City, CA, US
Overview
Patents· 10 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps43%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1013%
B32BLayered products, i.e. products built-up of strata of flat or non-flat, e.g. cellular or honeycomb, form9%
C23CCoating metallic material9%
H05HPlasma technique9%
Y10TTechnical subjects covered by former us classification9%
E01CConstruction of, or surfaces for, roads, sports grounds, or the like4%
H01LSemiconductor devices4%
PatentTitleYear
10,615,004Distributed electrode array for plasma processing202010,418,225Distributed electrode array for plasma processing201910,373,807Distributed electrode array for plasma processing201910,312,056Distributed electrode array for plasma processing20199,799,491'Low electron temperature etch chamber with independent control over plasma density, radical composition and ion energy for atomic precision etching'20179,570,275'Heated showerhead assembly'20179,196,462'Showerhead insulator and etch chamber liner'20158,876,024'Heated showerhead assembly'20147,777,599'Methods and apparatus for controlling characteristics of a plasma'20107,196,283'Plasma reactor overhead source power electrode with low arcing tendency, cylindrical gas outlets and shaped surface'2007Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2007–2020Patents assigned to APPLIED MATERIALS INC (10)· patent assignee history
2007–2020Based in Daly City, CA, US· patent location history
2014Patents assigned to BERA KALLOL (1)· patent assignee history
2014Patents assigned to BRILLHART PAUL (1)· patent assignee history
2014Patents assigned to BUCHBERGER DOUGLAS A (1)· patent assignee history
2014Patents assigned to CARDUCCI JAMES D (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 10 | 2007–2020 |
| BERA KALLOL | 1 | 2014 |
| BRILLHART PAUL | 1 | 2014 |
| BUCHBERGER DOUGLAS A | 1 | 2014 |
| CARDUCCI JAMES D | 1 | 2014 |
Locations
| Location | Patents | Span |
|---|---|---|
| Daly City, California, US | 10 | 2007–2020 |