Inventor
Garry K. Kwong
Inventor
San Jose, CA, US
Overview
Patents· 11 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
C23Cprimary
C23CCoating metallic material19%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1015%
H01LSemiconductor devices12%
B24BMachines, devices, or processes for grinding or polishing8%
G01BMeasuring length, thickness or similar linear dimensions8%
G01DMeasuring not specially adapted for a specific variable8%
H01JElectric discharge tubes or discharge lamps8%
G01FMeasuring volume, volume flow, mass flow or liquid level4%
H05BElectric heating4%
H05KPrinted circuits4%
PatentTitleYear
10,959,294High temperature heater for processing chamber202110,273,578Top lamp module for carousel deposition chamber201910,197,385Intelligent hardstop for gap detection and control mechanism20199,721,757'Elongated capacitively coupled plasma source for high temperature low pressure environments'20179,663,859'Intelligent hardstop for gap detection and control mechanism'20179,355,819'Elongated capacitively coupled plasma source for high temperature low pressure environments'20167,908,743'Method for forming an electrical connection'20117,781,016'Method for measuring precursor amounts in bubbler sources'20107,674,352'System and method for depositing a gaseous mixture onto a substrate surface using a showerhead apparatus'20106,000,997'Temperature regulation in a CMP process'19995,957,764'Modular wafer polishing apparatus and method'1999Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1999Patents assigned to APLEX INC (2)· patent assignee history
1999–2021Based in San Jose, CA, US· patent location history
2010–2021Patents assigned to APPLIED MATERIALS INC (9)· patent assignee history
2016Patents assigned to COLLINS KENNETH S (1)· patent assignee history
2016Patents assigned to FORSTER JOHN C (1)· patent assignee history
2016Patents assigned to GRIFFIN KEVIN (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 9 | 2010–2021 |
| APLEX INC | 2 | 1999 |
| COLLINS KENNETH S | 1 | 2016 |
| FORSTER JOHN C | 1 | 2016 |
| GRIFFIN KEVIN | 1 | 2016 |
Locations
| Location | Patents | Span |
|---|---|---|
| San Jose, California, US | 11 | 1999–2021 |