Inventor
Yoshinobu Kawai
Inventor
Fukuoka, JP
Overview
Patents· 4 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps60%
H05HPlasma technique20%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1020%
PatentTitleYear
6,452,400'Method of measuring negative ion density of plasma and plasma processing method and apparatus for carrying out the same'20026,431,114'Method and apparatus for plasma processing'20026,066,568'Plasma treatment method and system'20005,172,083'Microwave plasma processing apparatus'1992Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1992Patents assigned to NIPPON STEEL CORP (1)· patent assignee history
1992–2002Based in Fukuoka, JP· patent location history
2000–2002Patents assigned to TOKYO ELECTRON LTD (3)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 3 | 2000–2002 |
| NIPPON STEEL CORP | 1 | 1992 |
Locations
| Location | Patents | Span |
|---|---|---|
| Fukuoka, JP | 4 | 1992–2002 |