Inventor
MERRITT FUNK
Inventor
US
Overview
Patents· 13 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps46%
H01LSemiconductor devices14%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1014%
G01RMeasuring electric variables7%
C23CCoating metallic material4%
G05BControl or regulating systems in general4%
H01QAntennas, i.e. radio aerials4%
H03FAmplifiers4%
H03HImpedance networks, e.g. resonant circuits4%
PatentTitleYear
12,451,327Apparatus for plasma processing202512,272,520Process control enabled VDC sensor for plasma process202512,224,164Radio frequency (RF) system with embedded RF signal pickups202512,176,183RF voltage and current (V-I) sensors and measurement methods202412,119,207Apparatus for plasma processing202412,074,390Parallel resonance antenna for radial plasma control202412,057,293Methods for real-time pulse measurement and pulse timing adjustment to control plasma process performance202411,817,296RF voltage and current (V-I) sensors and measurement methods202311,728,135Electric pressure systems for control of plasma properties and uniformity202311,721,524Power generation systems and methods for plasma stability and control202311,600,474RF voltage and current (V-I) sensors and measurement methods202311,410,832RF measurement system and method202211,393,663Methods and systems for focus ring thickness determinations and feedback control2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2025Patents assigned to TOKYO ELECTRON LTD (13)· patent assignee history
2022–2025Based in US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 13 | 2022–2025 |
Locations
| Location | Patents | Span |
|---|---|---|
| US | 13 | 2022–2025 |