Inventor
Chang-jin Sohn
Inventor
Kwangmyeong, KR
Overview
Patents· 10 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices67%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1013%
B82YSpecific uses or applications of nanostructures7%
G02BOptical elements, systems or apparatus7%
H01JElectric discharge tubes or discharge lamps7%
PatentTitleYear
5,985,491'Reflectors for photolithographic projection and related systems and methods'19995,978,138'Projection exposure systems'19995,808,796'Projection method and projection system and mask therefor'19985,725,973'Photo mask and method for manufacturing same'19985,726,738'Aperture for off-axis illumination and projection exposure apparatus employing the same'19985,661,601'Projection method and projection system and mask therefor'19975,608,576'Projection method and projection system and mask therefor'19975,585,210'Mask pattern of a semiconductor device and a method of manufacturing fine patterns using the same'19965,547,788'Mask and method for manufacturing the same'19965,446,587'Projection method and projection system and mask therefor'1995Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1995–1999Patents assigned to SAMSUNG ELECTRONICS CO LTD (10)· patent assignee history
1995–1999Based in Kwangmyeong, KR· patent location history
1996–1999Based in Kyungki-do, KR· patent location history
1998Based in Seoul, KR· patent location history
1998Based in Songtan, KR· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| SAMSUNG ELECTRONICS CO LTD | 10 | 1995–1999 |
Locations
| Location | Patents | Span |
|---|---|---|
| Kwangmyeong, KR | 6 | 1995–1999 |
| Kyungki-do, KR | 2 | 1996–1999 |
| Seoul, KR | 1 | 1998 |
| Songtan, KR | 1 | 1998 |