Inventor
Hideyuki Chinju
Inventor
Shioya-gun, JP
Overview
Patents· 3 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H05Hprimary
H05HPlasma technique50%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices25%
G05BControl or regulating systems in general25%
PatentTitleYear
6,847,696'Synchrotron radiation measurement apparatus, X-ray exposure apparatus, and device manufacturing method'20056,665,371'Synchrotron radiation measurement apparatus, X-ray exposure apparatus, and device manufacturing method'20035,760,561'Method of controlling a stage and a system such as an exposing apparatus using the same'1998Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1998–2005Patents assigned to CANON KK (3)· patent assignee history
1998Based in Atsugi, JP· patent location history
2003Based in Ujiie-machi, JP· patent location history
2005Based in Shioya-gun, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| CANON KK | 3 | 1998–2005 |
Locations
| Location | Patents | Span |
|---|---|---|
| Shioya-gun, JP | 1 | 2005 |
| Ujiie-machi, JP | 1 | 2003 |
| Atsugi, JP | 1 | 1998 |