LexDanaLexDanabeta
Inventor

Harunobu Muto

Inventor
Tokyo, JP

Overview

1→
Patents
2005
Patent span
Performing operations
Primary field (CPC B)

Patents· 1 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

B82Yprimary
B82YSpecific uses or applications of nanostructures50%
H01JElectric discharge tubes or discharge lamps50%
PatentTitleYear
6,946,662'Multi-charged beam lens, charged-particle beam exposure apparatus using the same, and device manufacturing method'2005

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2005Patents assigned to HITACHI LTD (1)· patent assignee history
2005Based in Tokyo, JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
HITACHI LTD12005
Locations
LocationPatentsSpan
Tokyo, JP12005