Inventor
Sicco Ian Schets
Inventor
Eindhoven, NL
Overview
Patents· 11 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices64%
G01HMeasurement of mechanical vibrations or ultrasonic, sonic or infrasonic waves14%
G01SRadio direction-finding14%
A61BDiagnosis7%
PatentTitleYear
9,155,517'Opto-electrical ultrasound sensor and system'20158,240,211'Ultrasonic probe and method for the optical detection of ultrasonic waves'20128,139,217'Alignment systems and methods for lithographic systems'20127,880,880'Alignment systems and methods for lithographic systems'20117,565,219'Lithographic apparatus, method of determining a model parameter, device manufacturing method, and device manufactured thereby'20097,558,643'Lithographic apparatus, method of determining a model parameter, device manufacturing method, and device manufactured thereby'20097,439,531'Alignment systems and methods for lithographic systems'20087,332,732'Alignment systems and methods for lithographic systems'20087,329,888'Alignment systems and methods for lithographic systems'20087,297,971'Alignment systems and methods for lithographic systems'20077,288,779'Method for position determination, method for overlay optimization, and lithographic projection apparatus'2007Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2007–2012Patents assigned to ASML NETHERLANDS BV (9)· patent assignee history
2007–2012Based in Eindhoven, NL· patent location history
2012Patents assigned to BURGHOORN JACOBUS (1)· patent assignee history
2012Patents assigned to DUNBAR ALLAN REUBEN (1)· patent assignee history
2012–2015Based in Jena, DE· patent location history
2015Patents assigned to DUNBAR ALLAN (1)· patent assignee history
2015Patents assigned to EZONO AG (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ASML NETHERLANDS BV | 9 | 2007–2012 |
| BURGHOORN JACOBUS | 1 | 2012 |
| DUNBAR ALLAN | 1 | 2015 |
| DUNBAR ALLAN REUBEN | 1 | 2012 |
| EZONO AG | 1 | 2015 |
Locations
| Location | Patents | Span |
|---|---|---|
| Eindhoven, NL | 9 | 2007–2012 |
| Jena, DE | 2 | 2012–2015 |