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Inventor

Shiro Koyama

Inventor
Fuchu, JP

Overview

5→
Patents
1993–1997
Patent span
Electricity
Primary field (CPC H)

Patents· 5 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H01Jprimary
H01JElectric discharge tubes or discharge lamps33%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1025%
C23CCoating metallic material17%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices8%
H02NElectric machines not otherwise provided for8%
H05HPlasma technique8%
PatentTitleYear
5,665,167'Plasma treatment apparatus having a workpiece-side electrode grounding circuit'19975,625,526'Electrostatic chuck'19975,474,643'Plasma processing apparatus'19955,320,704'Plasma etching apparatus'19945,236,556'Plasma apparatus'1993

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

1993–1997Patents assigned to TOKYO ELECTRON LTD (5)· patent assignee history
1993–1995Patents assigned to TOSHIBA KK (2)· patent assignee history
1993–1997Based in Fuchu, JP· patent location history
1997Patents assigned to TEL YAMANISHI KK (1)· patent assignee history
1997Based in Tokyo, JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TOKYO ELECTRON LTD51993–1997
TOSHIBA KK21993–1995
TEL YAMANISHI KK11997
Locations
LocationPatentsSpan
Fuchu, JP41993–1997
Tokyo, JP11997