Inventor
JONATHAN MADSEN
Inventor
US
Overview
Patents· 6 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices32%
G01NInvestigating or analysing materials by determining their chemical or physical properties16%
H01JElectric discharge tubes or discharge lamps16%
G01BMeasuring length, thickness or similar linear dimensions11%
G02BOptical elements, systems or apparatus11%
G01QScanning-probe techniques or apparatus5%
G06NComputing arrangements based on specific computational models5%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h105%
PatentTitleYear
12,379,669Massive overlay metrology sampling with multiple measurement columns202511,899,375Massive overlay metrology sampling with multiple measurement columns202411,880,142Self-calibrating overlay metrology202411,604,420Self-calibrating overlay metrology202311,604,063Self-calibrated overlay metrology using a skew training sample202311,562,289Loosely-coupled inspection and metrology system for high-volume production process monitoring2023Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2023–2025Patents assigned to KLA CORP (6)· patent assignee history
2023Patents assigned to KLA TENCOR CORP (1)· patent assignee history
2023–2025Based in US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| KLA CORP | 6 | 2023–2025 |
| KLA TENCOR CORP | 1 | 2023 |
Locations
| Location | Patents | Span |
|---|---|---|
| US | 6 | 2023–2025 |