Inventor
ANWAR HUSAIN
Inventor
US
Overview
Patents· 10 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps31%
H01LSemiconductor devices28%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1028%
B05DProcesses for applying fluent materials to surfaces, in general3%
C23CCoating metallic material3%
G06FElectric digital data processing3%
G06QInformation and communication technology [ict] specially adapted for administrative, commercial, financial, managerial or supervisory purposes3%
PatentTitleYear
12,562,353Replaceable electrostatic chuck outer ring for edge arcing mitigation202612,341,048Porous plug for electrostatic chuck gas delivery202512,211,734Lift pin mechanism202512,198,903Plasma resistant arc preventative coatings for manufacturing equipment components202512,020,977Lift pin assembly202411,551,960Helical plug for reduction or prevention of arcing in a substrate support202311,551,916Sheath and temperature control of a process kit in a substrate processing chamber202311,543,954Scroll activity detection for selection and display of information202311,488,852Methods and apparatus for reducing high voltage arcing in semiconductor process chambers202211,424,096Temperature controlled secondary electrode for ion control at substrate edge2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2026Patents assigned to APPLIED MATERIALS INC (9)· patent assignee history
2022–2026Based in US· patent location history
2023Patents assigned to SMASHTECH LLC (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 9 | 2022–2026 |
| SMASHTECH LLC | 1 | 2023 |
Locations
| Location | Patents | Span |
|---|---|---|
| US | 10 | 2022–2026 |