Inventor
FENG YUAN HSU
Inventor
TW
Overview
Patents· 8 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices33%
Y02PClimate change mitigation technologies in the production or processing of goods17%
H01LSemiconductor devices11%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1011%
B24BMachines, devices, or processes for grinding or polishing6%
B24DTools for grinding, buffing or sharpening6%
G01BMeasuring length, thickness or similar linear dimensions6%
G01NInvestigating or analysing materials by determining their chemical or physical properties6%
H05GX-ray technique6%
PatentTitleYear
12,235,573EUV photomask and manufacturing method of the same202512,066,760Reticle-masking structure, extreme ultra violet apparatus, and method of forming the same202411,782,338EUV photomask and manufacturing method of the same202311,307,489EUV photomask and manufacturing method of the same202211,287,745Reticle-masking structure, extreme ultraviolet apparatus, and method of forming the same202211,260,495Apparatus and methods for chemical mechanical polishing202211,255,658Ellipsometer and method for estimating thickness of film202211,199,767Apparatus and method for generating an electromagnetic radiation2021Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2021–2025Patents assigned to TAIWAN SEMICONDUCTOR MFG CO LTD (8)· patent assignee history
2021–2025Based in TW· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TAIWAN SEMICONDUCTOR MFG CO LTD | 8 | 2021–2025 |
Locations
| Location | Patents | Span |
|---|---|---|
| TW | 8 | 2021–2025 |