Inventor

Eva Tois

Inventor

Espoo, FI

Overview

33→

Patents

2010–2021

Patent span

Electricity

Primary field (CPC H)

Patents· 33 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

C23Cprimary

C23CCoating metallic material24%

H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1023%

H01LSemiconductor devices20%

H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1017%

H10DInorganic electric semiconductor devices9%

B05DProcesses for applying fluent materials to surfaces, in general4%

C30BSingle-crystal growth3%

C09DCoating compositions, e.g. paints, varnishes or lacquers1%

PatentTitleYear

11,094,535Selective passivation and selective deposition2021 11,081,342Selective deposition using hydrophobic precursors2021 11,047,040Dual selective deposition2021 10,991,573Uniform deposition of SiOC on dielectric and metal surfaces2021 10,964,534Enhanced thin film deposition2021 10,923,361Deposition of organic films2021 10,900,120Passivation against vapor deposition2021 10,872,765Selective layer formation using deposition and removing2020 10,854,460Deposition of organic films2020 10,612,137Organic reactants for atomic layer deposition2020 10,553,440Methods for depositing nickel films and for making nickel silicide and nickel germanide2020 10,513,772Process for passivating dielectric films2019 10,456,808Selective deposition of metals, metal oxides, and dielectrics2019 10,453,701Deposition of organic films2019 10,443,123Dual selective deposition2019 10,373,820Deposition of organic films2019 10,297,444Enhanced thin film deposition2019 10,204,790Methods for thin film deposition2019 10,047,435Dual selective deposition2018 10,043,880Metal silicide, metal germanide, methods for making the same2018 9,895,715'Selective deposition of metals, metal oxides, and dielectrics'2018 9,831,094Enhanced thin film deposition2017 9,816,180'Selective deposition'2017 9,634,106'Doped metal germanide and methods for making the same'2017 9,514,956'Method of growing oxide thin films'2016 9,379,011'Methods for depositing nickel films and for making nickel silicide and nickel germanide'2016 9,127,351'Enhanced thin film deposition'2015 9,129,897'Metal silicide, metal germanide, methods for making the same'2015 8,993,055'Enhanced thin film deposition'2015 8,871,617'Deposition and reduction of mixed metal oxide thin films'2014 7,824,492'Method of growing oxide thin films'2010 7,771,533'Atomic-layer-chemical-vapor-deposition of films that contain silicon dioxide'2010 7,771,534'Method of growing oxide thin films'2010

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2010–2021Patents assigned to ASM INT (8)· patent assignee history

2010–2021Based in Espoo, FI· patent location history

2014–2021Patents assigned to ASM IP HOLDING BV (18)· patent assignee history

2014–2016Patents assigned to PORE VILJAMI J (3)· patent assignee history

2014–2021Based in Helsinki, FI· patent location history

2015–2019Patents assigned to BLOMBERG TOM E (3)· patent assignee history

2016–2021Patents assigned to ASM INT NV (8)· patent assignee history

Inventor activity

Assignee and location history derived from the patent record.

Assignees

Assignee	Patents	Span
ASM IP HOLDING BV	18	2014–2021
ASM INT	8	2010–2021
ASM INT NV	8	2016–2021
BLOMBERG TOM E	3	2015–2019
PORE VILJAMI J	3	2014–2016

Locations

Location	Patents	Span
Espoo, FI	19	2010–2021
Helsinki, FI	14	2014–2021